Metal complex source reagents for chemical vapor deposition

Details Metal complex source reagents for chemical vapor deposition Metal complex source reagents for chemical vapor deposition

1995-06-07

1998-11-24

Kight, John

Organic compounds -- part of the class 532-570 series

Organic compounds

Heterocyclic carbon compounds containing a hetero ring...

556 40, 556 42, 556 57, 556136, 549 3, 549206, 505100, 505124, 546257, C07F 900, C07F 1100, C07F 1500, C07D21322

Patent

active

058408975

ABSTRACT:
A metalorganic complex of the formula:

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