Metal carboxylate complexes for formation of metal-containing fi

Details Metal carboxylate complexes for formation of metal-containing fi Metal carboxylate complexes for formation of metal-containing fi

1996-12-03

1998-06-09

Nazario-Gonzalez, Porfirio

Organic compounds -- part of the class 532-570 series

Organic compounds

Heavy metal containing

C07F 1500

Patent

active

057636338

ABSTRACT:
A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.

REFERENCES:
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