Coating processes – Heat decomposition of applied coating or base material
Patent
1996-05-29
1997-12-09
Bell, Janyce
Coating processes
Heat decomposition of applied coating or base material
427 96, 4271261, 4271263, 427384, B05D 308
Patent
active
056958153
ABSTRACT:
A method of forming a metal-containing film on a substrate, such as a semiconductor wafer. The method involves depositing a Group VIII metal carboxylate complex on the substrate, wherein the Group VIII metal is selected from the group consisting of Ru, Os, Rh, Ir, Pd, and Pt, and thermally decomposing the Group VIII metal carboxylate complex to form the metal-containing film.
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Bell Janyce
Micro)n Technology, Inc.
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