Meta oxide coated carbon black for CMP

Details Meta oxide coated carbon black for CMP Meta oxide coated carbon black for CMP

2006-08-08

2006-08-08

Chen, Kin-Chan (Department: 1765)

Compositions

Etching or brightening compositions

C438S692000

Reexamination Certificate

active

07087187

ABSTRACT:
Using coated carbon black particles, coated with a selected coating material, as an abrasive in slurries or polishing pads for chemical-mechanical polishing processes. By adjusting the coating material on the carbon black particles, new abrasive particles for chemical-mechanical polishing are created with tailored performance properties.

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