Fluid handling – Processes – Involving pressure control
Reexamination Certificate
2005-01-28
2008-11-04
Krishnamurthy, Ramesh (Department: 3753)
Fluid handling
Processes
Involving pressure control
C137S486000, C137S487500, C137S514000, C251S129010, C251S331000, C251S335200
Reexamination Certificate
active
07445017
ABSTRACT:
A mesovalve having a diaphragm situated between a first chamber and a second chamber. There may be an inlet and an outlet in the first chamber. The diaphragm may provide an orifice between the first and second chambers. There may be a first electrode on the diaphragm and a second electrode on an inside surface of the second chamber. The diaphragm may have first and second positions, or numerous variable positions. Applying a voltage across the electrodes may electrostatically move the diaphragm to the second position during which the outlet is at least partially opened for fluid communication with the inlet, the orifice is closed and the diaphragm is stopped in the second position by a cushioning fluid pressure in the second cavity to prevent pull-in. Removing the voltage from the electrodes may let the diaphragm return to the first position, open the orifice and close the outlet.
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Banu Virgil Claudiu
Cabuz Cleopatra
Cabuz Eugen I.
Fredrick Kris T.
Honeywell International , Inc.
Krishnamurthy Ramesh
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