Mesa semiconductor structure

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With thin active central semiconductor portion surrounded by...

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Details

257620, 257623, H01L 21302, H01L 2974

Patent

active

056104340

ABSTRACT:
Mesa diodes of improved mechanical properties are formed by providing a central depression in the regions of the chip from which the mesa is formed before the diffusion step that forms the rectifying junction in the mesa. In symmetric diodes, symmetric depressions are formed on both the top and bottom surfaces of the chip.

REFERENCES:
patent: 3553536 (1971-01-01), Neilson
patent: 4220963 (1980-09-01), Rumennik
patent: 4259682 (1981-03-01), Gamo
patent: 5313092 (1994-05-01), Tsarata et al.

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