Coating apparatus – Immersion or work-confined pool type – Work-confined pool
Patent
1981-10-05
1983-01-04
McIntosh, John P.
Coating apparatus
Immersion or work-confined pool type
Work-confined pool
118412, H01L 21208
Patent
active
043667716
ABSTRACT:
Hg.sub.1-x Cd.sub.x Te is an important semiconductor for use in photovoltaic and photoconductive infrared photon detectors. Hg.sub.1-x Cd.sub.x Te can be grown by liquid phase epitaxy at atmospheric pressure from a Te-rich solution in which case the Hg vapor pressure is below 0.1 atm at 500.degree. C. This low vapor pressure makes possible the use of open-tube, slider growth techniques. The present invention describes a covered graphite slider system which provides an additional source of Hg, minimizes loss of Hg from the source wafer and virtually prevents loss of Hg from the (Hg.sub.1-x Cd.sub.x).sub.1-y Te.sub.y growth solution.
REFERENCES:
patent: 3770518 (1973-11-01), Rosztoczy et al.
"Holder for Liquid Phase Epitaxy Crystal Growth," DeGelormo et al., IBM Technical Disclosure Bulletin, vol. 16, No. 7, Dec. 1973.
Bowers John E.
Schmit Joseph L.
Dahle Omund R.
Honeywell Inc.
McIntosh John P.
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