Meniscus-contained method of handling fluids in the manufacture

Details Meniscus-contained method of handling fluids in the manufacture Meniscus-contained method of handling fluids in the manufacture

1975-04-28

1976-04-27

Powell, William A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

96 36, 96 362, 156 13, 156 17, 156345, H01L 21308

Patent

active

039532658

ABSTRACT:
The invention relates to a method for reducing the comsumption of etchants used in manufacturing semiconductor devices comprising the steps of supporting a semiconductor wafer, metering a predetermined volume of etchant onto the surface of said wafer to form a meniscus-contained body of etchant thereon, maintaining said wafer static during etching, sensing the completion of said etching, and spinning said wafer upon completion of the etching to remove the etchant from the wafer and terminate the etching operation.

REFERENCES:
patent: 3437543 (1969-04-01), Winings
patent: 3489608 (1970-01-01), Jacobs
patent: 3597289 (1971-08-01), Kohl et al.
patent: 3765984 (1973-10-01), Strehlow
patent: 3841930 (1974-10-01), Hetrich
patent: 3874959 (1975-04-01), Hoekstra et al.

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