MEMS variable inductor and capacitor

Details MEMS variable inductor and capacitor MEMS variable inductor and capacitor

2005-02-15

2005-02-15

Reichard, Dean A. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S278000, C361S280000, C361S292000, C361S294000, C361S299100

Reexamination Certificate

active

06856499

ABSTRACT:
A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.

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