MEMS tunable vertical-cavity semiconductor optical amplifier

Optical: systems and elements – Optical amplifier – Particular active medium

Reexamination Certificate

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C359S333000, C372S050100, C372S050110, C372S050124

Reexamination Certificate

active

07457033

ABSTRACT:
A MEMS-tunable semiconductor optical amplifier (SOA). A device in accordance with the present invention comprises a substrate, a first mirror, coupled to the substrate, a second mirror, an active region, coupled between the first and second mirror, and a microelectromechanical actuator, coupled to the second mirror, wherein a voltage is applied to the microelectromechanical actuator to tune the SOA.

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