MEMS tunable capacitor with a wide tuning range

Details MEMS tunable capacitor with a wide tuning range MEMS tunable capacitor with a wide tuning range

2008-07-01

2008-07-01

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S273000, C361S278000, C361S283100, C361S290000

Reexamination Certificate

active

11444357

ABSTRACT:
A MEMS tunable capacitor and method of fabricating the same, includes a plurality of fixed charge plates on a substrate, the plurality of fixed charge plates having a same height, being arranged in a shape of comb-teeth and being electrically connected to one another, a capacitor dielectric layer covering the plurality of fixed charge plates, a movable charge plate structure spaced apart from the capacitor dielectric layer, and arranged on the plurality of fixed charge plates, wherein the movable charge plate structure includes a plurality of movable charge plates arranged corresponding the plurality of fixed charge plates, and an actuator connected to the movable charge plate structure allowing the movable charge plate structure to move in a horizontal direction.

REFERENCES:
patent: 5015906 (1991-05-01), Cho et al.
patent: 6000287 (1999-12-01), Menzel
patent: 6215644 (2001-04-01), Dhuler
patent: 6355534 (2002-03-01), Cheng et al.
patent: 6380600 (2002-04-01), Alping et al.
patent: 6400550 (2002-06-01), Wood et al.
patent: 6417743 (2002-07-01), Mihailovich et al.
patent: 6518084 (2003-02-01), Seitz et al.
patent: 6541831 (2003-04-01), Lee et al.
patent: 6556415 (2003-04-01), Lee et al.
patent: 6661637 (2003-12-01), McIntosh et al.
patent: 6696343 (2004-02-01), Chinthakindi et al.
patent: 6701779 (2004-03-01), Volant et al.
patent: 6856499 (2005-02-01), Stokes
patent: 6885537 (2005-04-01), Nakayama
patent: 6897537 (2005-05-01), de los Santos
patent: 6970340 (2005-11-01), Nakayama
patent: 6980412 (2005-12-01), Cheng et al.
patent: 7109560 (2006-09-01), Strumpler
patent: 2002-0085990 (2002-11-01), None

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