MEMS switch

Optical waveguides – Miscellaneous

Reexamination Certificate

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Details

C385S015000, C385S016000

Reexamination Certificate

active

11471511

ABSTRACT:
A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.

REFERENCES:
patent: 6657525 (2003-12-01), Dickens et al.
patent: 2005/0236935 (2005-10-01), Ohmori et al.
patent: 2006/0144681 (2006-07-01), Lee et al.
Korean Office Action dated Nov. 17, 2006 issued in corresponding KR Patent Application No. 2005-115958.

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