MEMS surface modification for passive control of charge...

Details MEMS surface modification for passive control of charge... MEMS surface modification for passive control of charge...

2007-07-17

2007-07-17

Le, Dung A. (Department: 2818)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

C438S778000

Reexamination Certificate

active

11145060

ABSTRACT:
In one embodiment, a method of treating a surface of a Micro-Electromechanical System (MEMS) device reduces or eliminates performance degradation due to charge migration and accumulation. Briefly, the method may include treating a dielectric surface of the MEMS device to replace hydroxyl groups with electrically neutral molecules, thereby converting the dielectric surface from a hydrophilic to a substantially hydrophobic nature. A MEMS device having a surface treated using the aforementioned method is also disclosed.

REFERENCES:
patent: 2671078 (1954-03-01), McCormack
patent: 6054374 (2000-04-01), Gardner et al.
patent: 6387723 (2002-05-01), Payne et al.
patent: 6660552 (2003-12-01), Payne et al.

Affiliated with

Also associated with

Rating

MEMS surface modification for passive control of charge... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS surface modification for passive control of charge..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS surface modification for passive control of charge... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3797698