Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-06-07
2011-06-07
Dougherty, Thomas M (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S315000, C310S341000, C310S367000, C310S368000, C310S321000
Reexamination Certificate
active
07956517
ABSTRACT:
A MEMS structure having a temperature-compensated resonator member is described. The MEMS structure comprises an asymmetric stress inverter member coupled with a substrate. A resonator member is housed in the asymmetric stress inverter member and is suspended above the substrate. The asymmetric stress inverter member is used to alter the thermal coefficient of frequency of the resonator member by inducing a stress on the resonator member in response to a change in temperature.
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Bernstein David H.
Howe Roger T.
Motiee Mehrnaz
Quevy Emmanuel P.
Dougherty Thomas M
Gordon Bryan P
O'Keefe, Egan Peterman & Enders LLP
Silicon Laboratories
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