MEMS sensor for detecting stress corrosion cracking

Details MEMS sensor for detecting stress corrosion cracking MEMS sensor for detecting stress corrosion cracking

2005-08-09

2005-08-09

Noori, Max (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

By loading of specimen

C073S777000

Reexamination Certificate

active

06925888

ABSTRACT:
A sensor for measuring stress corrosion cracking and methods of using the sensor. The sensor is a MEMS device and has a cantilevered beam made from a material of interest. The sensor has on-chip electrical connections for measuring electrical characteristics that indicate cracking of the beam. The sensor may further have on-chip actuators for applying stress to the beam.

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International Search Report for PCT/US04/04958 mailed Nov. 18, 2004.

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