Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate
2007-05-15
2007-05-15
Tsai, H. Jey (Department: 2812)
Semiconductor device manufacturing: process
Making device or circuit responsive to nonelectrical signal
C438S053000, C257SE25030
Reexamination Certificate
active
11185271
ABSTRACT:
A micro-electro-mechanical system (MEMS) device includes a mirror having a top surface with trenches, a beam connected to the mirror, rotational comb teeth connected to the beam, and one or more springs connecting the beam to a bonding pad. The mirror can have a bottom surface for reflecting light. Stationary comb teeth can be interdigitated with the rotational comb teeth either in-plane or out-of-plane. Steady or oscillating voltage difference between the rotational and the stationary comb teeth can be used to oscillate or tune the mirror. The comb teeth can have a tapered shape.
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Partial Internation Search Report, 7 pages.
Internation Search Report, 8 pages.
Written Opinion, 10 pages.
Advanced NuMicro Systems, Inc.
Hsia David C.
Patent Law Group LLP
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