MEMS SAW sensor

Measuring and testing – Vibration – Resonance – frequency – or amplitude study

Reexamination Certificate

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Details

C310S31300R, C310S31300R, C073S702000

Reexamination Certificate

active

10964519

ABSTRACT:
Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.

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