Measuring and testing – Vibration – Resonance – frequency – or amplitude study
Reexamination Certificate
2007-07-17
2007-07-17
Williams, Hezron (Department: 2856)
Measuring and testing
Vibration
Resonance, frequency, or amplitude study
C310S31300R, C310S31300R, C073S702000
Reexamination Certificate
active
10964519
ABSTRACT:
Devices and methods for acoustically measuring temperature and pressure are disclosed. An illustrative SAW sensor can include an electrode structure that transmits and receives surface acoustic waves along a SAW delay line, a temperature sensor for measuring temperature along a first direction of the SAW delay line, and a pressure sensor for measuring pressure along a second direction of the SAW delay line. The SAW sensor can include an antenna that wirelessly transmits and receives RF signals to and from an electrical interrogator unit that can be used to power the SAW sensor.
REFERENCES:
patent: 4100811 (1978-07-01), Cullen et al.
patent: 4295102 (1981-10-01), Schmidt et al.
patent: 6003378 (1999-12-01), Scherr et al.
patent: 2003/0005759 (2003-01-01), Breed et al.
patent: 2005/0056098 (2005-03-01), Solie
patent: 2005/0062364 (2005-03-01), Van Der Knokke
patent: 10215834 (2003-06-01), None
patent: 10215834 (2003-11-01), None
patent: WO 0220287 (2002-03-01), None
patent: WO 0231461 (2002-04-01), None
patent: WO 2003078950 (2003-09-01), None
patent: WO 03081195 (2003-10-01), None
Reindl, et al., “Theory and Application of Passive SAW Radio Transponders as Sensors,” IEEE Transacations on Ultraosnics, Ferroelectrics, and Frequency Control, vol. 45, No. 5, pp. 1281-1292, Sep. 1998.
Tiersten, et al., “An Analysis of the Normal Acceleration Sensitivity of ST-Cut Quartz Surface Wave Resonators Rigidly supported Along the Edges”, 41st Annual Frequency Control Symposium, pp. 282-288, 1987.
Buff, et al., “Passive Remote Sensing for Temperature and Pressure Using SAW Resonator Devices,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control vol. 45, No. 5, pp. 1388-1392 Sep. 1998.
Benes et al., “Comparison between BAW and SAW Sensor Principles,” IEEE International Frequency Control Symposium, pp. 5-20, 1997.
Schimetta et al., “Optimized Design and Fabrication of a Wireless Pressure and Temperature Sensor Unit Based on SAW Transponder Technology,” IEEE MTT-S International Microwave Symposium Digest, pp. 355-358, 2001.
Reindl et al., “SAW Devices as Wireless Passive Sensors,” IEEE Ultrasonics Symposium, pp. 363-367, 1996.
Scherr et al., “Quartz Pressure Sensor Based on SAW Reflective Delay Line,” IEEE Ultrasonics Symposium, pp. 347-350, 1996.
Scholl et al., “Wireless Passive SAW Sensor Systems For Industrial and Domestic Applications,” IEEE International Frequency Control Symposium, pp. 595-601, 1998.
Cobianu Cornel P.
Cook James D.
Pavelescu Ioan
Fredrick Kris T.
Honeywell International , Inc.
Miller Rose M.
Williams Hezron
LandOfFree
MEMS SAW sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with MEMS SAW sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS SAW sensor will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3781605