MEMS RF switch module including a vertical via

Details MEMS RF switch module including a vertical via MEMS RF switch module including a vertical via

2008-01-29

2008-01-29

Dinh, Tuan T. (Department: 2841)

Electricity: electrical systems and devices

Housing or mounting assemblies with diverse electrical...

For electronic systems and devices

C361S781000, C361S783000, C174S253000, C333S101000, C333S105000, C333S258000, C333S259000, C335S078000

Reexamination Certificate

active

11546595

ABSTRACT:
An apparatus and method to provide a micro-electromechanical systems (MEMS) radio frequency (RF) switch module with a vertical via. The MEMS RF switch module includes a MEMS die coupled to a cap section. The vertical via passes through the cap section to electrically couple an RF switch array of the MEMS die to a printed circuit board (PCB). In one embodiment, the MEMS die includes a trace ring surrounding at least a portion of the RF switch array so that a signal may enter or exit the MEMS RF switch module using the vertical via without crossing the trace ring.

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