MEMS RF switch module including a vertical via

Details MEMS RF switch module including a vertical via MEMS RF switch module including a vertical via

2007-01-30

2007-01-30

Cuneo, Kamand (Department: 2841)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

With semiconductor element forming part

C257S415000, C257S728000, C174S262000, C361S767000, C361S768000

Reexamination Certificate

active

10606633

ABSTRACT:
An apparatus and method to provide a micro-electromechanical systems (MEMS) radio frequency (RF) switch module with a vertical via. The MEMS RF switch module includes a MEMS die coupled to a cap section. The vertical via passes through the cap section to electrically couple an RF switch array of the MEMS die to a printed circuit board (PCB). In one embodiment, the MEMS die includes a trace ring surrounding at least a portion of the RF switch array so that a signal may enter or exit the MEMS RF switch module using the vertical via without crossing the trace ring.

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