MEMS resonator-based signal modulation

Oscillators – Electromechanical resonator

Reexamination Certificate

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C331S1160FE, C333S186000, C333S197000

Reexamination Certificate

active

07812680

ABSTRACT:
Disclosed herein are devices and methods for generating a modulated signal with a MEMS resonator, or microresonator. A bias, or polarization, voltage for activating the MEMS resonator is determined by a control signal, or input voltage, indicative of information to be carried by the modulated signal. In some cases, the MEMS resonator may be driven by an oscillator circuit to facilitate operation of the MEMS resonator. The control signal may include an amplitude modulated voltage or a digital data stream such that output signals of the MEMS resonator or oscillator circuit may carry information via frequency modulation, such as frequency shift keying modulation.

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