MEMS resonator, a method of manufacturing thereof, and a...

Details MEMS resonator, a method of manufacturing thereof, and a... MEMS resonator, a method of manufacturing thereof, and a...

2006-12-18

2010-12-07

Kinkead, Arnold (Department: 2817)

Oscillators

Electromechanical resonator

C331S1160FE, C333S187000, C029S025350, C310S321000

Reexamination Certificate

active

07847649

ABSTRACT:
The invention relates to a MEMS resonator comprising a movable element (48), the movable element (48) comprising a first part (A) having a first Young's modulus and a first temperature coefficient of the first Young's modulus, and the movable element (48) further comprising a second part (B) having a second Young's modulus and a second temperature coefficient of the second. Young's modulus, a sign of the second temperature coefficient being opposite to a sign of the first temperature coefficient, at least, at operating conditions of the MEMS resonator, and a cross-sectional area of the first part (A) and the cross-sectional area of the second part (B) being such that the absolute temperature coefficient of the Young's modulus of the first part (A) multiplied by the cross-sectional area of the first part (A) does not deviate more than 20% from the absolute temperature coefficient of the Young's modulus of the second part (B) multiplied by the cross-sectional area of the second part (B), the cross-sectional areas being measured locally and perpendicularly to the movable element (48).

REFERENCES:
patent: 5963857 (1999-10-01), Greywall
patent: 6958566 (2005-10-01), Nguyen et al.
patent: 2002/0069701 (2002-06-01), Hsu et al.
patent: 2005/0162239 (2005-07-01), Lutz et al.
patent: 1548935 (2005-06-01), None
patent: 9829943 (1998-07-01), None
patent: 2005025057 (2005-03-01), None

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