MEMS processing

Details MEMS processing MEMS processing

2006-12-01

2010-10-19

Nguyen, Ha Tran T (Department: 2829)

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Reexamination Certificate

active

07816164

ABSTRACT:
Methods for forming a MEMS display device are provided. In one embodiment, a transparent substrate comprising an array of MEMS devices (e.g., interferometric modulators) formed thereon is annealed following removal of a sacrificial silicon layer. The array is subsequently encapsulated with a backplate comprising a desiccant. MEMS devices disposed below the desiccant have an offset voltage substantially equal to zero.

REFERENCES:
patent: 4036360 (1977-07-01), Deffeyes
patent: 4074480 (1978-02-01), Burton
patent: 4531126 (1985-07-01), Sadones
patent: 4844614 (1989-07-01), Henderson et al.
patent: 5244707 (1993-09-01), Shores
patent: 5304419 (1994-04-01), Shores
patent: 5591379 (1997-01-01), Shores
patent: 5610438 (1997-03-01), Wallace et al.
patent: 5614785 (1997-03-01), Wallace et al.
patent: 5882761 (1999-03-01), Kawami et al.
patent: 5939785 (1999-08-01), Klonis et al.
patent: 6040937 (2000-03-01), Miles
patent: 6261853 (2001-07-01), Howell et al.
patent: 6445062 (2002-09-01), Honda
patent: 6589625 (2003-07-01), Kothari et al.
patent: 6650455 (2003-11-01), Miles
patent: 6674562 (2004-01-01), Miles et al.
patent: 6680792 (2004-01-01), Miles
patent: 6791660 (2004-09-01), Hayashi et al.
patent: 7042643 (2006-05-01), Miles
patent: 7123216 (2006-10-01), Miles
patent: 7164520 (2007-01-01), Palmateer et al.
patent: 7368803 (2008-05-01), Gally et al.
patent: 7405924 (2008-07-01), Gaily et al.
patent: 7746537 (2010-06-01), Natarajan
patent: 2002/0056900 (2002-05-01), Liu et al.
patent: 2002/0063322 (2002-05-01), Robbins et al.
patent: 2002/0119724 (2002-08-01), Hammel
patent: 2002/0126364 (2002-09-01), Miles
patent: 2002/0149096 (2002-10-01), Liebeskind
patent: 2003/0062186 (2003-04-01), Boroson et al.
patent: 2003/0108306 (2003-06-01), Whitney et al.
patent: 2003/0121418 (2003-07-01), Loop et al.
patent: 2003/0122137 (2003-07-01), Hashimoto
patent: 2003/0138656 (2003-07-01), Sparks
patent: 2003/0160021 (2003-08-01), Platt et al.
patent: 2003/0184412 (2003-10-01), Gorrell
patent: 2004/0051929 (2004-03-01), Sampsell et al.
patent: 2004/0061492 (2004-04-01), Lopes et al.
patent: 2004/0100677 (2004-05-01), Huibers et al.
patent: 2004/0115856 (2004-06-01), Jung et al.
patent: 2004/0122175 (2004-06-01), Hekal
patent: 2004/0166603 (2004-08-01), Carley
patent: 2004/0189195 (2004-09-01), Allemand
patent: 2004/0213962 (2004-10-01), Bourdelais et al.
patent: 2004/0259370 (2004-12-01), Bergman
patent: 2005/0074919 (2005-04-01), Patel et al.
patent: 2005/0093134 (2005-05-01), Tarn
patent: 2005/0247477 (2005-11-01), Kothari et al.
patent: 2005/0253283 (2005-11-01), Dcamp et al.
patent: 2005/0254115 (2005-11-01), Palmateer et al.
patent: 2006/0066600 (2006-03-01), Palmateer
patent: 2006/0066935 (2006-03-01), Cummings et al.
patent: 2006/0076632 (2006-04-01), Palmateer et al.
patent: 2006/0076637 (2006-04-01), Gally
patent: 2006/0077126 (2006-04-01), Kothari
patent: 2006/0077145 (2006-04-01), Floyd
patent: 2006/0077146 (2006-04-01), Palmateer
patent: 2006/0077147 (2006-04-01), Pamateer et al.
patent: 2006/0077503 (2006-04-01), Palmateer et al.
patent: 2007/0170568 (2007-07-01), Palmateer et al.
patent: 2007/0268201 (2007-11-01), Sampsell
patent: 2007/0268581 (2007-11-01), Palmateer
patent: 2008/0112036 (2008-05-01), Cummings
patent: 2008/0164544 (2008-07-01), Palmateer et al.
patent: 0 667 548 (1995-08-01), None
patent: 0 969 700 (2000-01-01), None
patent: 1 251 546 (2002-10-01), None
patent: 1418154 (2004-05-01), None
patent: 1 640 323 (2006-03-01), None
patent: 1 640 324 (2006-03-01), None
patent: 02-068513 (1990-03-01), None
patent: 03-199920 (1991-08-01), None
patent: 2003-217828 (2003-07-01), None
patent: WO 02/39513 (2002-05-01), None
patent: WO 02/42716 (2002-05-01), None
patent: WO 03/009317 (2003-01-01), None
patent: WO 2005/110914 (2005-11-01), None
patent: WO 2005/114294 (2005-12-01), None
Keusseyan et al., A new approach for opto-electronic/MEMS packaging, Proceedings 52nd Electronic Components and Technology Conference, ECTC May 2002, pp. 259-262.
Previti et al., Getters: micromolecular scavengers for packaging, Proceedings International Symposium on Advanced Packaging Materials Processes, Properties and Interfaces, 2001, pp. 201-206.
Moraja, et al., Advanced Getter Solutions at Wafer Level to Assure High Reliability to the last Generations MEMS, IEEE Reliability Physics Symposium Proceedings, 2003, pp. 458-459.
Sparks, et al. Chip-Level Vacuum Packaging of Micromachines Using NanoGetters, IEEE Transactions on Advanced Packaging, vol. 26 Issue 3, Aug. 2003, pp. 277-282.
ISR and WO for PCT/US07/023393 filed Nov. 8, 2007.
IPRP for PCT/US07/023393 filed Nov. 8, 2007.

Affiliated with

Also associated with

Rating

MEMS processing does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS processing, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS processing will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4198961