MEMS process and device

Details MEMS process and device MEMS process and device

2010-03-09

2010-12-28

Toledo, Fernando L (Department: 2895)

Textiles: spinning, twisting, and twining

Apparatus and processes

Open end spinning

C257S415000, C257S419000, C257SE21001, C257SE21526, C257SE29324

Reexamination Certificate

active

07856804

ABSTRACT:
A MEMS device comprising a flexible membrane that is free to move in response to pressure differences generated by sound waves. A first electrode mechanically coupled to the flexible membrane, and together form a first capacitive plate. A second electrode mechanically coupled to a generally rigid structural layer or back-plate, which together form a second capacitive plate. A back-volume is provided below the membrane. A first cavity located directly below the membrane. Interposed between the first and second electrodes is a second cavity. A plurality of bleed holes connected the first cavity and the second cavity. Acoustic holes are arranged in the back-plate so as to allow free movement of air molecules, such that the sound waves can enter the second cavity. The first and second cavities in association with the back-volume allow the membrane to move in response to the sound waves entering via the acoustic holes in the back-plate.

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