MEMS pressure sensing array with leaking sensor

Details MEMS pressure sensing array with leaking sensor MEMS pressure sensing array with leaking sensor

2006-04-04

2006-04-04

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C257S415000

Reexamination Certificate

active

07021151

ABSTRACT:
A pressure sensing system formed in a monolithic semiconductor substrate. The pressure sensing system comprises a pressure sensing device formed on the monolithic semiconductor substrate. Pressure sensing device is adapted to be disposed in an environment for developing an electrical pressure signal corresponding to the pressure in the environment. The system includes driver circuitry formed in the monolithic semiconductor substrate. The driver circuitry is responsive to input electrical signal for generating an output pressure signal. A conductive interconnect structure formed in the monolithic semiconductor substrate to electrically connects the pressure sensing device to the driver circuitry such that electrical pressure signals developed by the pressure sensing device are provided as input electrical signals to the driver circuitry.

REFERENCES:
patent: 5663508 (1997-09-01), Sparks
patent: 5963788 (1999-10-01), Barron et al.
patent: 2002/0115920 (2002-08-01), Rich et al.
patent: 2004/0016995 (2004-01-01), Kuo et al.
patent: 2005/0208696 (2005-09-01), Villa et al.

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