Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Passivating of surface
Reexamination Certificate
2005-01-05
2008-12-02
Sefer, A. (Department: 2826)
Semiconductor device manufacturing: process
Making device or circuit emissive of nonelectrical signal
Passivating of surface
C438S052000, C438S763000, C438S780000, C427S096200, C427S097100
Reexamination Certificate
active
07459325
ABSTRACT:
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
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Jacobs Simon Joshua
Miller Seth Adrian
Brady III Wade J.
Sefer A.
Telecky , Jr. Frederick J.
Texas Instruments Incorporated
Wilson Scott R
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