MEMS oscillator

Details MEMS oscillator MEMS oscillator

2011-04-12

2011-04-12

Pascal, Robert (Department: 2817)

Oscillators

Frequency stabilization

Temperature or current responsive means in circuit

C331S1160FE, C331S156000

Reexamination Certificate

active

07924109

ABSTRACT:
Provided is a MEMS oscillation circuit which performs temperature compensation of a MEMS resonator with a simple circuit, which is mild so that an output clock does not have jitter, and which makes the range of fluctuations of a reference frequency from a reference value equivalent to a range of digital processing. The MEMS oscillator includes a MEMS resonator, a temperature measurement unit for measuring a temperature and outputting a detected voltage corresponding to the temperature, and a bias voltage control circuit for applying the MEMS resonator with a bias voltage which changes the resonant frequency of the MEMS resonator in a manner opposite to a change of the resonant frequency of the MEMS resonator due to temperature change correspondingly to the detected voltage.

REFERENCES:
patent: 6292066 (2001-09-01), Shibuya et al.
patent: 6995622 (2006-02-01), Partridge et al.
patent: 2007/0222532 (2007-09-01), Takeuchi et al.
patent: 2007-518351 (2007-07-01), None

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