MEMS optical switches with guaranteed switching status

Details MEMS optical switches with guaranteed switching status MEMS optical switches with guaranteed switching status

2005-08-16

2005-08-16

Connelly-Cushwa, Michelle R. (Department: 2874)

Optical waveguides

With optical coupler

Switch

C385S016000, C398S019000

Reexamination Certificate

active

06931173

ABSTRACT:
Techniques for controlling and monitoring MEMS optical switches are disclosed. In one embodiment, an electronic feedback loop is employed to determine a control signal to a MEMS switch actuator in accordance with an instruction. The control signal is so determined in such a way that the switching statuses are maximally guaranteed. To generate an appropriate control signal, AC or DC impedances of the MEMS switch are detected and used to configure the control signal to drive the switch. When it is detected that the impedance changes do not meet respective thresholds, the control signal is adjusted. In the case that the stiction happens, the switch actuator is overcharged, discharged and repeatedly applied for a limited time to overcome the stiction.

REFERENCES:
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patent: 6301402 (2001-10-01), Bhalla
patent: 6459524 (2002-10-01), Zhang
patent: 6519383 (2003-02-01), Cannell
patent: 6574384 (2003-06-01), Cannell
patent: 6828884 (2004-12-01), Wyeth et al.
patent: 2003/0048036 (2002-03-01), Lemkin
patent: 2002/0167713 (2002-11-01), Le

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