Measuring and testing – Dynamometers – Responsive to force
Reexamination Certificate
2005-01-26
2010-02-02
Noori, Max (Department: 2855)
Measuring and testing
Dynamometers
Responsive to force
C073S777000
Reexamination Certificate
active
07654159
ABSTRACT:
A force sensor (200) and nanoidenation system (300) using such force sensor (200), wherein the force sensor (200) comprise a movable membrane (207) attached to a fixed bulk structure (210) with springs (201, 202, 203, 204) formed between the membrane (207) and bulk structure (210); the springs (201, 202, 203, 204) may be provided two on each side of a rectangular membrane(207) and each in the form of a U-shape with displacing elements (801) formed perpendicular to each open end of each U-shaped spring (800). The force sensor further comprises electrodes (206) for detecting capacitive changes between the movable membrane (207) and the electrodes (206) in order to measure a movement in relation to an applied force. The membrane (207) further comprises a probe holding structure (214) for providing a solution for interchangeable probes (211).
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International Search Report (PCT/ISA/210).
Althoff Fredrik
Dahlström Jens
Danilov Andrey
Enoksson Peter
Nafari Alexandra
Harness & Dickey & Pierce P.L.C.
Nanofactory Instruments AB
Noori Max
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