MEMS mirror with tip or piston motion for use in adaptive...

Details MEMS mirror with tip or piston motion for use in adaptive... MEMS mirror with tip or piston motion for use in adaptive...

2004-09-29

2008-03-18

Thompson, Timothy (Department: 2873)

Optical: systems and elements

Mirror

Including specified control or retention of the shape of a...

C359S846000

Reexamination Certificate

active

07344262

ABSTRACT:
An array of high fill factor mirrors has each mirror be coupled across two deformable spring bars that are deformed using a drive. The two deformable springs are parallel to each other, and coupled together, e.g., by a cross bar. A support is coupled at one end to the cross bar and at its opposite end to the mirror. Coupled across the deformable spring bars on the opposite side thereof from the mirror support, is at least one moveable drive plate. Motion by the moveable drive plate causes the deformable spring bars to torque, e.g., in the local vicinity of the connection of the drive plate to the deformable spring bars. The torque causes the deformable spring bars to move downward, e.g., near their centers. As a result, cross bar, and hence the mirror, move downward.

REFERENCES:
patent: 5959760 (1999-09-01), Yamada et al.
patent: 2002/0164111 (2002-11-01), Mirza
patent: 2004/0245888 (2004-12-01), Aksyuk et al.

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