MEMS microswitch having a conductive mechanical stop

Details MEMS microswitch having a conductive mechanical stop MEMS microswitch having a conductive mechanical stop

2007-12-20

2009-10-27

Donovan, Lincoln (Department: 2832)

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

C200S181000

Reexamination Certificate

active

07609136

ABSTRACT:
A MEMS switch includes a substrate, a movable actuator coupled to the substrate, a substrate contact, a substrate electrode, and a conductive stopper electrically coupled to the movable actuator and structured to prevent the movable actuator from contacting the substrate electrode while allowing the movable actuator to make contact with the substrate contact.

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European Search Report dated Apr. 28, 2009.

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