MEMS microdetonator/initiator apparatus for a MEMS fuze

Details MEMS microdetonator/initiator apparatus for a MEMS fuze MEMS microdetonator/initiator apparatus for a MEMS fuze

2007-07-31

2009-02-17

Bergin, James S (Department: 3641)

Ammunition and explosives

Igniting devices and systems

Arming devices

C200S061080, C361S251000, C102S221000, C102S202500

Reexamination Certificate

active

07490552

ABSTRACT:
A MEMS apparatus having a substrate layer, a device layer and an intermediate oxide layer joining them. A slider is formed in the device layer and includes an enlarged end portion. A walled chamber having a hollow interior in which is positioned a microdetonator is formed in the substrate layer beneath the enlarged end portion and is secured to it by the oxide layer. A drive is operable to move the slider, and with it, the walled chamber, from an initial position to a final position. When in the final position an initiator is operable to initiate the microdetonator.

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