MEMS mass spectrometer

Details MEMS mass spectrometer MEMS mass spectrometer

2008-07-22

2008-07-22

Vanore, David A. (Department: 2881)

Radiant energy

Ionic separation or analysis

Static field-type ion path-bending selecting means

C250S281000, C250S282000, C250S296000, C250S299000, C250S397000, C438S456000

Reexamination Certificate

active

07402799

ABSTRACT:
A MEMS mass spectrometer having metal walls connected between a lid and base, with the walls defining a plurality of interior chambers including sample gas input chambers, an ionizer chamber, a plurality of ion optics chambers and a ion separation chamber. A detector array at the end of the ion separation chamber includes a plurality of V-shaped detector elements positioned along two parallel lines and arranged to intercept all of the ionized beams produced in the mass spectrometer.

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