MEMS integrated circuit comprising microfluidic diaphragm valve

Details MEMS integrated circuit comprising microfluidic diaphragm valve MEMS integrated circuit comprising microfluidic diaphragm valve

2008-06-20

2011-11-22

Bullock, In Suk (Department: 1772)

Chemical apparatus and process disinfecting, deodorizing, preser

Analyzer, structured indicator, or manipulative laboratory...

Miscellaneous laboratory apparatus and elements, per se

C422S502000, C422S503000, C422S504000, C422S505000, C251S011000, C251S129010, C251S331000, C251S335200, C137S067000, C137S341000, C137S833000, C137S637000

Reexamination Certificate

active

08062612

ABSTRACT:
A MEMS integrated circuit comprising one or more microfluidic diaphragm valves and control circuitry for the valves. Each valve comprises: an inlet port; an outlet port; a weir positioned between the inlet and outlet ports, the weir having a sealing surface; a diaphragm membrane for sealing engagement with the sealing surface; and a thermal bend actuator for moving the diaphragm membrane between a closed position in which the membrane is sealingly engaged with the sealing surface and an open position in which the membrane is disengaged from the sealing surface. The control circuitry is configured to control actuation of the actuator so as to control opening and closing of the valve.

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