MEMS inductor with very low resistance

Inductor devices – Coil or coil turn supports or spacers – Printed circuit-type coil

Reexamination Certificate

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Reexamination Certificate

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11200384

ABSTRACT:
A very, very low resistance micro-electromechanical system (MEMS) inductor, which provides resistance in the single-digit milliohm range, is formed by utilizing a single thick wide loop of metal formed around a magnetic core structure. The magnetic core structure, in turn, can utilize a laminated Ni—Fe structure that has an easy axis and a hard axis.

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Jin Woo Park, Florent Cros and Mark G. Allen, “A Sacrificial Layer Approach To Highly Laminated Magnetic Cores,” in Proc. 15th IEEE Int. Confer. MEMS, Jan. 2002, pp. 380-383.
Jin-Woo Park and Mark G. Allen, “Ultralow-Profile Micromachined Power Inductors With Highly Laminated Ni/Fe Cores:Application To Low-Megahertz DC-DC Converters”, IEEE Transactions On Magnetics, vol. 39, No. 5, Sep. 2003, pp. 3184-3186.
David P. Arnold, Florent Cros, Iulica Zana, David R. Veazie and Mark G. Allen, “Electroplated Metal Microstructures Embedded In Fusion-Bonded Silicon:Conductors And Magnetic Materials”, Journal of Micromechanical Systems, vol. 13, No. 5, Oct. 2004, pp. 791-796.
David P. Arnold, Iulica Zana, Florent Cros and Mark G. Allen, “Vertically Laminated Magnetic Cores By Electroplating Ni-Fe Into Micromachined Si”, IEEE Transactions On Magnetics, vol. 40, No. 40, Jul. 2004, pp. 3060-3062.

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