MEMS flow sensor

Details MEMS flow sensor MEMS flow sensor

2005-12-09

2008-03-04

Thompson, Jewel (Department: 2855)

Measuring and testing

Volume or rate of flow

Using differential pressure

Reexamination Certificate

active

07337678

ABSTRACT:
A micro-electro-mechanical, micro-fluidic flow sensor (14) includes a flow separating element (15) for separating a first portion (24) of a fluid flow (25) from a second portion (26) of the fluid flow. The flow sensor also includes a flow obstructing member (17) disposed in the first portion of the flow for at least partially obstructing the first portion of the flow. The flow obstructing member deflects in response to the first portion of the flow so that a degree of partial obstruction of the first portion of the flow by the flow obstructing member varies in response to the first portion of the fluid flow.

REFERENCES:
patent: 4290314 (1981-09-01), Geronime
patent: 4403514 (1983-09-01), Osborn
patent: 4932269 (1990-06-01), Cammarata, III et al.
patent: 4989456 (1991-02-01), Stupecky
patent: 5554805 (1996-09-01), Bahrton
patent: 5970801 (1999-10-01), Ciobanu et al.
patent: 6729196 (2004-05-01), Moler et al.
patent: 6786036 (2004-09-01), Kight
patent: 6848320 (2005-02-01), Miyajima et al.
patent: 2005/0092106 (2005-05-01), Sheplak et al.
patent: 2005/0109122 (2005-05-01), Misholi et al.

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