MEMS fabrication on a laminated substrate

Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C200S181000

Reexamination Certificate

active

07884689

ABSTRACT:
Systems and methods are provided that facilitate the formation of micro-mechanical structures and related systems on a laminated substrate. More particularly, a micro-mechanical device and a three-dimensional multiple frequency antenna are provided for in which the micro-mechanical device and antenna, as well as additional components, can be fabricated together concurrently on the same laminated substrate. The fabrication process includes a low temperature disposition process allowing for deposition of an insulator material at a temperature below the maximum operating temperature of the laminated substrate, as well as a planarization process allowing for the molding and planarizing of a polymer layer to be used as a form for a micro-mechanical device.

REFERENCES:
patent: 6069587 (2000-05-01), Lynch et al.
patent: 6417807 (2002-07-01), Hsu et al.
patent: 6469677 (2002-10-01), Schaffner et al.
patent: 6608268 (2003-08-01), Goldsmith
patent: 6625004 (2003-09-01), Musolf et al.
patent: 6649852 (2003-11-01), Chason et al.
patent: 6657324 (2003-12-01), Marumoto
patent: 6686820 (2004-02-01), Ma et al.
patent: 6812814 (2004-11-01), Ma et al.
patent: 6852926 (2005-02-01), Ma et al.
patent: 6859119 (2005-02-01), Eliacin et al.
patent: 6924966 (2005-08-01), Prophet
patent: 6987435 (2006-01-01), Ko et al.
patent: 6994757 (2006-02-01), Allen et al.
patent: 2003/0015936 (2003-01-01), Yoon et al.
patent: 2003/0058069 (2003-03-01), Schwartz et al.
Cetiner et al.,Microwave Laminate PCB Compatible RF MEMS Technology for Wireless Communication Systems, Antennas and Propagation Society International Symposium, 2003. IEEE, Published Jun. 2003, vol. 1, pp. 387-390.
Cetiner, et al.,Monolithic Integration of RF MEMS Switches with a Diversity Antenna on PCB Substrate, IEEE Transactions on Microwave Theory and Techniques, vol. 15, No. 1, Jan. 2003, pp. 332-335.
Chang et al.,RF MEMS Switches Fabricated on Microwave-Laminate Printed Circuit Boards, IEEE Electron Device Letters, vol. 24, No. 4, Apr. 2003, pp. 227-229.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

MEMS fabrication on a laminated substrate does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS fabrication on a laminated substrate, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS fabrication on a laminated substrate will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2631643

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.