MEMS enhanced capacitive pick-off and electrostatic...

Electricity: measuring and testing – Electrical speed measuring – With acceleration measuring means

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C073S514320

Reexamination Certificate

active

06841992

ABSTRACT:
A Micro Electro-Mechanical System (MEMS) acceleration sensing device, formed of a sensing element having first and second substantially planar and parallel spaced apart opposing surfaces and being suspended for pendulous motion about a hinge axis oriented along a minor axis of the sensing element; and one or more substrates each having a face spaced from one of the opposing surfaces of the sensing element, each of the substrates having pluralities of electrodes arranged substantially crosswise to the hinge axis of the sensing element symmetrically to a longitudinal axis of the sensing device and forming respective first and second capacitors with the moveable sensing element. Each of the one or more substrates optionally including a clearance relief for extending the rotational range of motion of the sensing element.

REFERENCES:
patent: 5719336 (1998-02-01), Ando et al.
patent: 6167757 (2001-01-01), Yazdi et al.
patent: 6199874 (2001-03-01), Galvin et al.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

MEMS enhanced capacitive pick-off and electrostatic... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with MEMS enhanced capacitive pick-off and electrostatic..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and MEMS enhanced capacitive pick-off and electrostatic... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-3408222

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.