MEMS element, GLV device, and laser display

Details MEMS element, GLV device, and laser display MEMS element, GLV device, and laser display

2006-03-21

2006-03-21

Schwartz, Jordan (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S302000, C359S290000

Reexamination Certificate

active

07016099

ABSTRACT:
A MEMS element is constituted as a light modulation element for constituting a GLV device, and it has the same constitution as a conventional MEMS element except for differing in the structure of a bridge member of a membrane. The membrane comprises SiN film of, for example, 100 nm in thickness laminated thereon, and a combined light reflective film and membrane-side electrode composed of an Al film of 100 nm in thickness provided on the bridge member. The SiO2film may be a SiO2film formed by thermal oxidation of a sacrificing layer formed of polysilicon or may be a SiO2film formed by a CVD method or a PVD method.

REFERENCES:
patent: 6437925 (2002-08-01), Nishioka
patent: 2002/0070931 (2002-06-01), Ishikawa
patent: 2002/0181110 (2002-12-01), Bower et al.
patent: 2004/0141224 (2004-07-01), Huibers

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