MEMS electrospray nozzle for mass spectroscopy

Details MEMS electrospray nozzle for mass spectroscopy MEMS electrospray nozzle for mass spectroscopy

1998-01-27

1999-11-30

Nguyen, Kiet T.

Radiant energy

Ionic separation or analysis

With sample supply means

B01D 5944

Patent

active

059946962

ABSTRACT:
An apparatus for MEMS electrospray nozzle for mass spectroscopy formed with top and bottom of SiN, and a between layer of material. The material between the top and bottom forms a filter and also reduces the amount of dead space in the nozzle.

REFERENCES:
patent: 5541408 (1996-07-01), Sittler

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