MEMS electrometer that measures amount of repulsion of...

Electricity: measuring and testing – Electrostatic field – Using modulation-type electrometer

Reexamination Certificate

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Reexamination Certificate

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07924018

ABSTRACT:
An apparatus for detecting a static field includes a microelectromechanical systems (MEMS) device having two cantilevered beams of conductive material that are adjacent and substantially parallel to each other. The two beams repel each other in the presence of a static field. At least one sensor detects a respective amount of displacement of the two cantilevered beams from a rest position and determines an amount of repulsion of the two cantilevered beams from each other.

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