MEMS direct chip attach packaging methodologies and...

Details MEMS direct chip attach packaging methodologies and... MEMS direct chip attach packaging methodologies and...

2005-01-25

2005-01-25

Pert, Evan (Department: 2829)

Measuring and testing

Instrument casing

C438S055000, C438S064000, C438S110000, C438S112000, C438S121000, C438S127000, C257S433000, C257S678000, C257S787000

Reexamination Certificate

active

06845664

ABSTRACT:
Methods of bulk manufacturing high temperature sensor sub-assembly packages are disclosed and claimed. Sensors are sandwiched between a top cover and a bottom cover so as to enable the peripheries of the top covers, sensors and bottom covers to be sealed and bound securely together are disclosed and claimed. Sensors are placed on the bottom covers leaving the periphery of the bottom cover exposed. Likewise, top covers are placed on the sensors leaving the periphery of the sensor exposed. Individual sensor sub-assemblies are inserted into final packaging elements which are also disclosed and claimed. Methods of directly attaching wires or pins to contact pads on the sensors are disclosed and claimed. Sensors, such as pressure sensors and accelerometers, and headers made out of silicon carbide and aluminum nitride are disclosed and claimed. Reference cavities are formed in some embodiments disclosed and claimed herein where top covers are not employed.

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