Computer graphics processing and selective visual display system – Plural physical display element control system – Display elements arranged in matrix
Reexamination Certificate
2006-03-21
2006-03-21
Epps, Georgia (Department: 2873)
Computer graphics processing and selective visual display system
Plural physical display element control system
Display elements arranged in matrix
C345S204000
Reexamination Certificate
active
07015885
ABSTRACT:
Described are MEMS mirror arrays monolithically integrated with CMOS control electronics. The MEMS arrays include polysilicon or polysilicon-germanium components that are mechanically superior to metals used in other MEMS applications, but that require process temperatures not compatible with conventional CMOS technologies. CMOS circuits used with the polysilicon or polysilicon-germanium MEMS structures use interconnect materials that can withstand the high temperatures used during MEMS fabrication. These interconnect materials include doped polysilicon, polycides, and tungsten metal.
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Novotny Vlad
Reddy Chitranjan N.
Sastri Bharat
Active Optical Networks, Inc.
Behiel Arthur J.
Dinh Jack
Silicon Edge Law Group LLP.
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