Optical waveguides – Temporal optical modulation within an optical waveguide
Reexamination Certificate
2006-08-18
2010-06-29
Le, Uyen-Chau N (Department: 2874)
Optical waveguides
Temporal optical modulation within an optical waveguide
Reexamination Certificate
active
07747109
ABSTRACT:
Embodiments of MEMS devices include a movable layer supported by overlying support structures, and may also include underlying support structures. In one embodiment, the residual stresses within the overlying support structures and the movable layer are substantially equal. In another embodiment, the residual stresses within the overlying support structures and the underlying support structures are substantially equal. In certain embodiments, substantially equal residual stresses are be obtained through the use of layers made from the same materials having the same thicknesses. In further embodiments, substantially equal residual stresses are obtained through the use of support structures and/or movable layers which are mirror images of one another.
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Kogut Lior
Zhong Fan
Knobbe Martens Olson & Bear LLP
Le Uyen-Chau N
QUALCOMM MEMS Technologies Inc.
Tran Hoang
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