MEMS device having formations for covering actuators of the...

Details MEMS device having formations for covering actuators of the... MEMS device having formations for covering actuators of the...

2006-06-06

2006-06-06

Gordon, Raquel Yvette (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

07055933

ABSTRACT:
A micro-electromechanical device that comprises a substrate; an elongate actuator that has a fixed end that is connected to the substrate and a movable end, the actuator being configured so that the movable end is displaced relative to the substrate on receipt of an actuation signal; a motion-transmitting structure that is fast with the movable end of the actuator, the motion transmitting structure being connected to a working member so that movement of the actuator is translated to the working member; and a covering formation that is positioned on the substrate so that the substrate, the covering formation and the motion-transmitting structure define an air chamber, the actuator being positioned within the air chamber.

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