Optics: image projectors – Reflector – Plural
Reexamination Certificate
2007-08-07
2007-08-07
Perkey, W. B. (Department: 2851)
Optics: image projectors
Reflector
Plural
C359S291000, C359S295000, C359S846000, C348S771000
Reexamination Certificate
active
11372686
ABSTRACT:
A micromirror array fabricated on a semiconductor substrate. The array is comprised of three operating layers. An addressing layer is fabricated on the substrate. A hinge layer is spaced above the addressing layer by an air gap. A mirror layer is spaced over the hinge layer by a second air gap. The hinge layer has a hinge under and attached to the mirror, the hinge permitting the mirror to tilt. The hinge layer further has spring tips under the mirror, which are attached to the addressing layer. These spring tips provide a stationary landing surface for the mirror.
REFERENCES:
patent: 5535047 (1996-07-01), Hornbeck
patent: 5943157 (1999-08-01), Florence et al.
patent: 6028690 (2000-02-01), Carter et al.
patent: 6147790 (2000-11-01), Meier et al.
patent: 2003/0117686 (2003-06-01), DiCarlo
patent: 2003/0142382 (2003-07-01), DiCarlo
DiCarlo Anthony
Huffman James D.
Knipe Richard L.
Mezenner Rabah
Oden Patrick I.
Brady III Wade James
Brill Charles A.
Perkey W. B.
Sever Andrew
Telecky , Jr. Frederick J.
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