Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-09-29
2009-08-25
Schwartz, Jordan M. (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S290000
Reexamination Certificate
active
07580172
ABSTRACT:
A microelectromechanical systems device having an electrical interconnect between circuitry outside the device and at least one of an electrode and a movable layer within the device. At least a portion of the electrical interconnect is formed from the same material as a conductive layer between the electrode and a mechanical layer of the device. In an embodiment, this conductive layer is a sacrificial layer that is subsequently removed to form a cavity between the electrode and the movable layer. The sacrificial layer is preferably formed of molybdenum, doped silicon, tungsten, or titanium. According to another embodiment, the conductive layer is a movable reflective layer that preferably comprises aluminum.
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Batey John
Kothari Manish
Lewis Alan G.
Sasagawa Teruo
Tung Ming-Hau
Jones James C
Knobbe Martens Olson & Bear LLP
Qualcomm Mems Technologies, Inc.
Schwartz Jordan M.
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