MEMS device and a MEMS device array

Details MEMS device and a MEMS device array MEMS device and a MEMS device array

2009-02-20

2011-11-01

Font, Frank (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Using a periodically moving element

C359S202100

Reexamination Certificate

active

08049944

ABSTRACT:
A two-axis tiltable linear array of MEMS micromirrors is described. The individual micromirrors of the array are flexibly suspended over a common substrate by using two pairs of serpentine hinges coupled by a gimbal ring and are actuated by using tilt and roll electrodes. The tilt actuator regions of the micromirrors are disposed within the gimbal rings, the roll hinges connecting the tilt actuator regions to the micromirrors, which provides for decoupling of the tilt and the roll of the micromirror. The structure allows for considerable decoupling of the tilt and the roll and, or the pistoning effects observed upon micromirror actuation. The structure is suitable for application in a wavelength selective optical switch.

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