Electricity: magnetically operated switches – magnets – and electr – Electromagnetically actuated switches – Polarity-responsive
Reexamination Certificate
2006-09-05
2006-09-05
Enad, Elvin (Department: 2832)
Electricity: magnetically operated switches, magnets, and electr
Electromagnetically actuated switches
Polarity-responsive
C200S181000
Reexamination Certificate
active
07102472
ABSTRACT:
A MEMS device having a support frame positioned on a substrate surrounding a first electrode. A rigid flange portion at the top of the support frame is closely space from, and is connected to, a second electrode by relatively short spring members. RF conductors connected to respective first and second electrodes complete an RF switch. A dielectric layer on the first electrode forms a capacitive type device and includes an electrostatic shield layer on its surface. This electrostatic shield layer is connected to ground by a multi megohm bleeder resistance.
REFERENCES:
patent: 5673785 (1997-10-01), Schlaak et al.
patent: 6396372 (2002-05-01), Sakata et al.
Kirby Christopher
Nathanson Harvey C.
Tranchini Robert
Young Robert M.
Birch & Stewart Kolasch & Birch, LLP
Enad Elvin
Northrop Grumman Corporation
Rojas Bernard
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