MEMS cooling device

Details MEMS cooling device MEMS cooling device

2006-08-26

2010-11-02

Jules, Frantz F. (Department: 3744)

Refrigeration

Structural installation

With electrical component cooling

C062S185000, C062S201000, C361S699000, C165S080400, C165S120000

Reexamination Certificate

active

07823403

ABSTRACT:
A preferred embodiment of the MEMS cooling device of the invention comprises one or more MEMS micro-channel volumes in communication with one or more MEMS micro-pump assemblies wherein each micro-pump assembly comprises a flexure valve, such as a leaf valve and means to drive a coolant through the channel volumes such as an electrostatic interleaved comb drive structure. A preferred embodiment comprises an inlet micro-pump assembly and an outlet micro-pump assembly but the device may also be fabricated with a single pump mechanism per channel volume.

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