MEMS cavity-coating layers and methods

Details MEMS cavity-coating layers and methods MEMS cavity-coating layers and methods

2007-03-21

2010-06-08

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Reexamination Certificate

active

07733552

ABSTRACT:
Devices, methods, and systems comprising a MEMS device, for example, an interferometric modulator, that comprises a cavity in which a layer coats multiple surfaces. The layer is conformal or non-conformal. In some embodiments, the layer is formed by atomic layer deposition (ALD). Preferably, the layer comprises a dielectric material. In some embodiments, the MEMS device also exhibits improved characteristics, such as improved electrical insulation between moving electrodes, reduced stiction, and/or improved mechanical properties.

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